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Electron Tomography of Microelectronic Device Interconnects

Published online by Cambridge University Press:  01 August 2005

Q Yang ,
J Mardinly ,
C Kübel ,
C Nelson  and
C Kisielowski
Q Yang
Affiliation:
University of California, Berkeley
J Mardinly
Affiliation:
Intel Corporation, Santa Clara, California
C Kübel
Affiliation:
FEI Company, The Netherlands
C Nelson
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, California
C Kisielowski
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, California

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 2090 - 2091
Copyright
© 2005 Microscopy Society of America