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Electron Tomography for 3D Nanoscale Characterization of Semiconductor Materials and Devices

Published online by Cambridge University Press:  09 October 2013

G. Haberfehlner ,
P. Bayle-Guillemaud ,
G. Audoit ,
M.J. Smith ,
S. Crawford ,
S. Gradečak ,
P.-H. Morel ,
T. Ernst ,
N. Gambacorti  and
P. Bleuet
G. Haberfehlner
Affiliation:
P. Bayle-Guillemaud
Affiliation:
G. Audoit
Affiliation:
M.J. Smith
Affiliation:
S. Crawford
Affiliation:
S. Gradečak
Affiliation:
P.-H. Morel
Affiliation:
T. Ernst
Affiliation:
N. Gambacorti
Affiliation:
P. Bleuet
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 576 - 577
Copyright
Copyright © Microscopy Society of America 2013