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Electron Backscatter Diffraction Analysis of Beam Sensitive Samples Using Direct Detection Technology

Published online by Cambridge University Press:  22 July 2022

Matthew M Nowell
Affiliation:
EDAX LLC., Pleasanton, CA USA
René de Kloe
Affiliation:
EDAX B.V., Tilburg, The Netherlands

Abstract

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Type
Electron Microscopy of Beam Sensitive Samples: The Trials and Tribulations of Electron-beam Sample Interactions
Copyright
Copyright © Microscopy Society of America 2022

References

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