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Electron Annealing in Aluminum Interconnects Observed Using In Situ TEM Technique

Published online by Cambridge University Press:  09 October 2013

D. Xie ,
M. Li  and
Z. Shan
D. Xie
Affiliation:
M. Li
Affiliation:
Z. Shan
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 502 - 503
Copyright
Copyright © Microscopy Society of America 2013