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EFTEM, EELS, and Cathodoluminescence in Si-implanted SiO2 Layers

Published online by Cambridge University Press:  26 July 2009

H-J Fitting ,
L Fitting Kourkoutis ,
R Salh  and
B Schmidt
H-J Fitting
Affiliation:
University of Rostock,Germany
L Fitting Kourkoutis
Affiliation:
Cornell University
R Salh
Affiliation:
University of Rostock,Germany
B Schmidt
Affiliation:
Research Center Dresden-Rossendorf,Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1104 - 1105
Copyright
Copyright © Microscopy Society of America 2009