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Effect of Specimen Aspect Ratio on the Reconstruction of Atom Probe Tomography Data
Published online by Cambridge University Press: 02 July 2020
Extract
The field ion microscope is a point projection microscope, with the magnification inversely proportional to the radius of curvature (R) of the needle-shaped tip which comprises the specimen. The electric field at the specimen apex, which determines the trajectories of field evaporated ions, is given by F=V/(kR), where V is the specimen voltage and k is a geometric field reduction factor which increases with the specimen taper angle, θ. In the reconstruction of atom probe tomography (APT) data, the magnification, and thus the lateral extent of the analyzed region, is determined primarily by the specimen radius and taper angle. Asymmetric specimens may often be fabricated, even from materials which lend themselves to straightforward preparation. In addition, in certain materials, specimens with high aspect ratios may result from crystallographic preferential electropolishing. For accurate data reconstruction, it is important to know not only the specimen radius, but also, ideally, the degree of anisotropy (aspect ratio taper angle in orthogonal directions) of the specimen.
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- Copyright © Microscopy Society of America
References
1. Gomer, R., Field Emission and Field Ionization, American Institute of Physics (1993).Google Scholar
2. Blavette, D. et al., Rev. Phys. Appl. 17 (1982) 435.CrossRefGoogle Scholar
3. Hyde, J. M. et al., Appl. Surf. Sci. 76/77 (1994) 382.CrossRefGoogle Scholar
4. Bas, P. et al., Appl. Surf. Sci. 87/88 (1995) 298.CrossRefGoogle Scholar
5. This research was sponsored by the Division of Materials Sciences, U. S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp. This research was conducted utilizing the Shared Research Equipment User Facilities at ORNL.Google Scholar
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