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Effect of Sampling on Geometric Phase Analysis Sensitivity for Strain Measurement in Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  22 July 2022

A. Pofelski*
Affiliation:
Department of Materials Science and Engineering, McMaster University, Hamilton, ON, Canada
G. A. Botton*
Affiliation:
Department of Materials Science and Engineering, McMaster University, Hamilton, ON, Canada Canadian Light Source, 44 Innovation Boulevard, Saskatoon, SK, Canada
*
Corresponding authors: [email protected], [email protected]
Corresponding authors: [email protected], [email protected]

Abstract

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Type
Science of Metrology with Electrons
Copyright
Copyright © Microscopy Society of America 2022

References

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The authors are grateful to the Natural Sciences and Engineering Research Council for a Discovery Grant supporting this workGoogle Scholar