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Effect of Pre- And Post-Deposition Heat Treatment on Microstructure and Electrical Properties of ITO Films Deposited on Pet and Glass Substrates

Published online by Cambridge University Press:  02 July 2020

T. Dolukhanyan ,
J.G. Kwon ,
S.C. Moon ,
M.G. Kang  and
C. Sung
T. Dolukhanyan
Affiliation:
Department of Chemical and Nuclear Engineering, Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA01854
J.G. Kwon
Affiliation:
Samsung Display Devices, Suwon Plant, South Korea
S.C. Moon
Affiliation:
Samsung Display Devices, Suwon Plant, South Korea
M.G. Kang
Affiliation:
Samsung Display Devices, Chonan Plant, South Korea
C. Sung
Affiliation:
Department of Chemical and Nuclear Engineering, Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA01854
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ITO films on PET in combination with ITO films on glass substrates are extensively used in Touch Panel Displays fabrication. Main properties of interest for these systems are high optical transmittance ∽95%, low resistivity ∽10−3 Ωcm, coupled with uniform and stable sheet resistivity demanded for long term use.

The goal of this investigation is to understand relationship between microstructure and electrical/optical properties of ITO films on PET and glass substrates as a function of pre- and postdeposition annealing parameters.

ITO films of ∽60 nm thick have been deposited by radiofrequency magnetron sputtering. This method can be applied over a wide range of substrate temperatures. This is essential for plastic substrates such as PET. Regions of good and poor conductivity have been identified for TEM analysis and Analytical Electron Microscope (Philips 400 EM), equipped with light element Noran Instrument Energy Dispersive X-ray Spectrometer (EDXS) have been utilized.

Type
Thin Films/Coatings
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 840 - 841
Copyright
Copyright © Microscopy Society of America

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References

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