Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-26T04:24:52.819Z Has data issue: false hasContentIssue false

Effect of Nitrogen Content on the Microstructure and Hardness of Hard Zr–B–C–N Films

Published online by Cambridge University Press:  27 August 2014

Minghui Zhang
Affiliation:
Department of Materials Science and Engineering, The University of Texas at Arlington, Arlington,Texas 76019, USA
Jiechao Jiang
Affiliation:
Department of Materials Science and Engineering, The University of Texas at Arlington, Arlington,Texas 76019, USA
Jaroslav Vlček
Affiliation:
Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech Republic
Petr Steidl
Affiliation:
Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech Republic
Efstathios I. Meletis
Affiliation:
Department of Materials Science and Engineering, The University of Texas at Arlington, Arlington,Texas 76019, USA

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Braic, M., Balacenu, M., Vladescu, A., Zoita, C.N.and Braic, V. Thin Solid Films 519 (2011) 4092.Google Scholar
[2] Cheng, Y.H., Browne, T., Heckerman, B. and Meletis, E.I. Surf. Coat. Technol., 205 (2011)4024.Google Scholar
[3] Vlček, J., et al, J. Vac. Sci. Technol., A 26 (2008) 1101.Google Scholar
[4] Čapek, J., et al,, Surf. Coat. Technol. , 203 (2008) 466.Google Scholar
[5] Houška, J., Vlček, J., Potocký, Š., Peřina, V., Mater., Diamond Relat. 16 (2007) 29.Google Scholar
[6] He, J., et al, Thin Solid Films, 542 (2013)167.Google Scholar
[7] Vlček, J., et al, Surf. Coat. Technol., 215 (2013) 186.Google Scholar
[8] This work was supported by the National Science Foundation under Award NSF/CMMI 1335502.Google Scholar