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Effect of Metal-Assisted Catalytic Etching (MACE) on Single-Crystal Si Wafers With Faceted Macropores

Published online by Cambridge University Press:  05 August 2019

Alexis T. Ernst ,
Kurt W. Kolasinski ,
Bret A. Unger  and
Mark Aindow
Alexis T. Ernst
Affiliation:
Institute of Materials Science, University of Connecticut, Storrs, CT, 06269, USA
Kurt W. Kolasinski
Affiliation:
Department of Chemistry, West Chester University, West Chester, PA, 19383, USA
Bret A. Unger
Affiliation:
Department of Chemistry, University of California, Berkeley, CA, 94720, USA
Mark Aindow
Affiliation:
Institute of Materials Science, University of Connecticut, Storrs, CT, 06269, USA

Abstract

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Type
Microscopy and Spectroscopy of Nanoscale Materials for Energy Applications
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2124 - 2125
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Mai, L, Tian, X, Xu, X, Chang, L, and Xu, L., Chem. Rev. 114 (2014), pp. 11828-11862Google Scholar
[2]Li, X, Curr. Opin. Solid State Mater. Sci. 16:2 (2012) pp. 71-81Google Scholar
[3]Chartier, C, Bastide, S, and Lévy-Clément, C. Electrochimica Acta. 53:17 (2008), pp. 5509-5516Google Scholar
[4]Chiappini, C, Liu, X, Fakhoury, JR, and Ferrari, M. Adv. Func. Mater. 20 (2010), pp. 2231-2239Google Scholar
[5]Kolasinski, KW, Unger, BA, Ernst, A, Aindow, M, Front Chem. 6 (2019) art. #651Google Scholar
[6]Funding was provided by NSF Grant #1825331, West Chester University, and the resources of the Center for Microanalysis and Imaging Research and Training (CMIRT)Google Scholar
[7]The microscopy studies were performed in the UConn / Thermo Fisher Scientific Center for Advanced Microscopy and Materials Analysis (CAMMA).Google Scholar