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Effect of Cleaning Parameters on Cleaning Effectiveness in an SEM Equipped with an RF Plasma Anti-Contamination Device

Published online by Cambridge University Press:  05 August 2007

R Garcia ,
AD Batchelor ,
CB Mooney ,
AD Garetto ,
R Vane  and
DP Griffis
R Garcia
Affiliation:
North Carolina State University
AD Batchelor
Affiliation:
North Carolina State University
CB Mooney
Affiliation:
North Carolina State University
AD Garetto
Affiliation:
North Carolina State University
R Vane
Affiliation:
XEI Scientific
DP Griffis
Affiliation:
North Carolina State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1732 - 1733
Copyright
© 2007 Microscopy Society of America

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