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EELS Characterization of Patterned Low-k Materials

Published online by Cambridge University Press:  01 August 2010

Y Otsuka ,
Y Shimizu ,
N Kawasaki ,
K Kurushima  and
S Ogawa
Y Otsuka
Affiliation:
Toray Research Center, Japan
Y Shimizu
Affiliation:
Toray Research Center, Japan
N Kawasaki
Affiliation:
Toray Research Center, Japan
K Kurushima
Affiliation:
Toray Research Center, Japan
S Ogawa
Affiliation:
Semiconductor Leading Edge Technologies, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1546 - 1547
Copyright
Copyright © Microscopy Society of America 2010