Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-27T06:31:29.942Z Has data issue: false hasContentIssue false

EELS Characterization of Electronic Structure in Group III - Nitrides Compared With Synchrotron Ellipsometry Results

Published online by Cambridge University Press:  02 July 2020

G. Brockt
Affiliation:
Gerhard-Mercator-Universität Duisburg, Werkstoffe der Elektrotechnik, D-47048, Duisburg, Germany
H. Lakner
Affiliation:
Fraunhofer Institut für Mikroelektronische Schaltungen und Systeme, D-01109, Dresden, Germany
Get access

Extract

EELS in the low loss region of the spectra (< 50eV) provides information on excitations of outer shell electrons and thus the electronic structure of a specimen material which determines its optical properties. In this work dedicated EELS methods for the experimental acquisition and analysis of spectra are described which give improved information about the electronic structure near the bandgap region at a spatial resolution in the range of nanometers. For this purpose we made use of a cold field emission STEM equipped with a dedicated EELS system. This device provides a subnanometer electron probe and offers an energy resolution of 0.35 eV. Application of suitable deconvolution routines for removal of the zero loss peak extracts information on the closest bandgap region while Kramers-Kronig transformation deduces the dielectric properties from the measured energy loss function. These methods have been applied to characterize the optical properties of wide-bandgap materials for the case of group Ill-nitride compounds which are currently the most promising material for applications on optoelectronic devices working in the blue and ultraviolet spectral range.

Type
A. Howie Symposium: Celebration of Pioneering Electron Microscopy
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Logothetidis, et al., (1994) Phys. Rev. B 50 1801718029CrossRefGoogle Scholar
2.McMullan, et al., (1992) Electron Microscopy I 103104Google Scholar
3.Rafferty, B.E. (1997) PhD-Thesis University of Cambridge U.K.Google Scholar
4.Wethkamp, T.et al., (1998) Thin Solid Films 745 313314Google Scholar