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e-Beam Detection of Buried Open Defects in Semiconductor Device

Published online by Cambridge University Press:  05 August 2019

Kwame Owusu-Boahen ,
Po-Chin Kuo ,
Thaung H. Oo ,
Liliam E. Fernandez  and
Carl Chang Hun
Kwame Owusu-Boahen
Affiliation:
Samsung Austin Semiconductor, LLC, Austin, TX, USA.
Po-Chin Kuo
Affiliation:
Samsung Austin Semiconductor, LLC, Austin, TX, USA.
Thaung H. Oo
Affiliation:
Samsung Austin Semiconductor, LLC, Austin, TX, USA.
Liliam E. Fernandez
Affiliation:
Samsung Austin Semiconductor, LLC, Austin, TX, USA.
Carl Chang Hun
Affiliation:
Samsung Austin Semiconductor, LLC, Austin, TX, USA.

Abstract

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Type
Microscopy and Spectroscopy of Nanoscale Materials for Energy Applications
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2254 - 2255
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Soucek, M et al. , Semiconductor International 26(8) (2003), p. 80.Google Scholar
[2]Yougui, L, in “Practical Electron Microscopy and Database”, (GlobalSino).Google Scholar