Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-26T15:44:27.819Z Has data issue: false hasContentIssue false

Dynamic Analysis of Nanomachining with a Multi- Cracked AFM Cantilever

Published online by Cambridge University Press:  27 August 2014

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Binnig, G., Quate, C.F.and Gerber, C. Phy. Rev. Lett. 56 (1986) p.930.Google Scholar
[2] Lee, J.M., Kim, Y.B.and Park, J.W. J. Nanosci. Nanotech. 13 (2013) p.7741.Google Scholar
[3] Yang, F., et al, Int. J. Solids Struct. 39 (2002) p.2731.Google Scholar
[4] Kahrobaiyan, M.H., et al, Int. J. Eng. Sci. 48 (2010) p.1985.Google Scholar
[5] Wu, T.S., Chang, W.J.and Hsu, J.C. Microelectr. Eng. 71 (2004)p.15.Google Scholar