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Dual-beam Focused Ion Beam: A Multifunctional Tool for Nanotechnology

Published online by Cambridge University Press:  01 November 2002

N. Yao ,
E. Kung ,
S. Allameh  and
W. O. Soboyejo
N. Yao
Affiliation:
Princeton University, Princeton Materials Institute, Princeton, NJ 08540
E. Kung
Affiliation:
Princeton University, Princeton Materials Institute, Princeton, NJ 08540
S. Allameh
Affiliation:
Princeton University, Princeton Materials Institute, Princeton, NJ 08540
W. O. Soboyejo
Affiliation:
Princeton University, Princeton Materials Institute, Princeton, NJ 08540

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 56 - 57
Copyright
Copyright © Microscopy Society of America 2002