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D-STEM: A Parallel Electron Diffraction Technique Applied to Nanomaterials

Published online by Cambridge University Press:  31 August 2010

K.J. Ganesh ,
M. Kawasaki ,
J.P. Zhou  and
P.J. Ferreira
K.J. Ganesh
Affiliation:
Materials Science and Engineering, The University of Texas at Austin, 1 University Station, C2200, Austin, TX 78712, USA
M. Kawasaki
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd., Peabody, MA 01960, USA
J.P. Zhou
Affiliation:
Materials Science and Engineering, The University of Texas at Austin, 1 University Station, C2200, Austin, TX 78712, USA
P.J. Ferreira*
Affiliation:
Materials Science and Engineering, The University of Texas at Austin, 1 University Station, C2200, Austin, TX 78712, USA
*
Corresponding author. E-mail: [email protected]
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Abstract

An electron diffraction technique called D-STEM has been developed in a transmission electron microscopy/scanning transmission electron microscopy (TEM/STEM) instrument to obtain spot electron diffraction patterns from nanostructures, as small as ∼3 nm. The electron ray path achieved by configuring the pre- and postspecimen illumination lenses enables the formation of a 1–2 nm near-parallel probe, which is used to obtain bright-field/dark-field STEM images. Under these conditions, the beam can be controlled and accurately positioned on the STEM image, at the nanostructure of interest, while sharp spot diffraction patterns can be simultaneously recorded on the charge-coupled device camera. When integrated with softwares such as GatanTM STEM diffraction imaging and Automated Crystallography for TEM or DigistarTM, NanoMEGAS, the D-STEM technique is very powerful for obtaining automated orientation and phase maps based on diffraction information acquired on a pixel by pixel basis. The versatility of the D-STEM technique is demonstrated by applying this technique to nanoparticles, nanowires, and nano interconnect structures.

Keywords

parallel electron diffractionnanobeamTEM/STEMnanoparticlesnanowiresspot diffraction patterns
Type
STEM Development and Applications
Information
Microscopy and Microanalysis , Volume 16 , Issue 5 , October 2010 , pp. 614 - 621
Copyright
Copyright © Microscopy Society of America 2010

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References

REFERENCES

Alloyeau, D., Ricolleau, C., Okiawa, T., Lanlois, C., Bouar, Y.L. & Loiseau, A. (2008). STEM nanodiffraction technique for structural analysis of CoPt nanoparticles. Ultramicroscopy 108, 656–662.CrossRefGoogle ScholarPubMed
Amberger, E., Stumpf, W. & Buschbeck, K.C. (1981). Gmelin Handbook of Inorganic Chemistry. Berlin: Springer-Verlag.Google Scholar
Andrieveski, R.A. & Glezer, A.M. (2001). Size effects in properties of nanomaterials. Scripta Mater 44, 1621–1624.CrossRefGoogle Scholar
Cowley, J.M. (1996). Electron nanodiffraction: Progress and prospects. J Elect Microsc 45, 3–10.CrossRefGoogle Scholar
Cowley, J.M. (1999). Electron nanodiffraction. Microsc Res Techniq 46, 75–97.3.0.CO;2-S>CrossRefGoogle ScholarPubMed
Cowley, J.M. (2004). Applications of electron nanodiffraction. Micron 34, 345–360.CrossRefGoogle Scholar
Cowley, J.M., Janney, D.E., Gerkin, R.C. & Buseck, P.R. (2000). The structure of ferritin cores determined by electron nanodiffraction. J Struct Biol 131, 210–216.CrossRefGoogle ScholarPubMed
Fultz, B. & Howe, J.M. (2001). Convergent-beam electron diffraction. In Transmission Electron Microscopy and Diffractometry of Materials, pp. 306–307. New York: Springer.CrossRefGoogle Scholar
He, H. & Nelson, C. (2007). A method of combining STEM image with parallel beam diffraction and electron-optical conditions for diffractive imaging. Ultramicroscopy 107, 340–344.CrossRefGoogle ScholarPubMed
Herzer, G. (2005). Anisotropy in soft magnetic nanocrystalline alloys. J Magn Mag Mat 294, 99–106.CrossRefGoogle Scholar
Humphreys, F.J. (2004). Characterization of fine scale microstructures by electron backscatter diffraction (EBSD). Scripta Mater 51, 771–776.CrossRefGoogle Scholar
Kolb, U., Gorelik, T., Kubel, C., Otten, M.T. & Hubert, D. (2007). Towards automated diffraction tomography: Part I—Data acquisition. Ultramicroscopy 107, 507–513.CrossRefGoogle ScholarPubMed
Kumar, K.S., Swygenhoven, V.H. & Suresh, S. (2003). Mechanical behavior of nanocrystalline metals and alloys. Acta Mater 51, 5743–5774.CrossRefGoogle Scholar
Lu, L., Shen, Y., Chen, X., Qian, L. & Lu, K. (2004). Ultrahigh strength and high electrical conductivity in copper. Science 304, 422–426.CrossRefGoogle ScholarPubMed
Lund, A.C. & Schuh, C.A. (2005). Strength asymmetry in nanocrystalline metals under multiaxial loading. Acta Mater 53, 3193–3205.CrossRefGoogle Scholar
Rolland, P., Dicks, K. & Ravel-Chapuis, R. (2002). EBSD spatial resolution in the SEM when analyzing small grains or deformed material. Microsc Microanal 8(S2), 670CD–671CD.CrossRefGoogle Scholar
Voyles, P.M. & Muller, D.A. (2002). Fluctuation microscopy in the STEM. Ultramicroscopy 93, 147–159.CrossRefGoogle ScholarPubMed