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Dislocation Analysis of Semiconductor Devices using 3D Rotation Imaging Technique of Dedicated STEM

Published online by Cambridge University Press:  26 July 2009

TS Back ,
SJ Lee ,
JW Jung ,
JH Kim  and
HJ Kim
TS Back
Affiliation:
Hynix Semiconductor Inc,Korea
SJ Lee
Affiliation:
Hynix Semiconductor Inc,Korea
JW Jung
Affiliation:
Hynix Semiconductor Inc,Korea
JH Kim
Affiliation:
Hynix Semiconductor Inc,Korea
HJ Kim
Affiliation:
Hynix Semiconductor Inc,Korea

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 338 - 339
Copyright
Copyright © Microscopy Society of America 2009