Nanoindentation is becoming an increasingly important tool for the characterization of the mechanical properties of materials on the nanometer scale. The mechanical response of a material is measured by recording the force acting between an indenter and the material while displacing the indenter into the material. The shape of the recorded load displacement curves is not only dependent on the mechanical properties of the material, but also strongly dependent on indenter geometry. To minimize difficulties in the extraction of quantitative material mechanical property information from the force curve, indenter geometry must be controlled and characterized on the same scale as the indentation, i.e. on the nanometer scale. Diamond, the hardest naturally occurring material, is an obvious choice as the indenter material. Conventional lapping techniques4 do not provide sufficient control to produce indenter geometries of the shapes and to the precision required for optimal nanoindentation measurements.