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Development of Observation Method for Spatial Electromagnetic Fields by Using Conventional Scanning Electron/Ion Microscope

Published online by Cambridge University Press:  22 July 2022

Ken Harada ,
Keiko Shimada  and
Yoshio Takahashi
Ken Harada*
Affiliation:
Institute of Physical and Chemical Research, Hatoyama, Saitama, Japan
Keiko Shimada
Affiliation:
Institute of Physical and Chemical Research, Hatoyama, Saitama, Japan
Yoshio Takahashi
Affiliation:
Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama, Japan
*
*Corresponding author: [email protected]

Abstract

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Type
Science of Metrology with Electrons
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 780 - 781
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Copyright
Copyright © Microscopy Society of America 2022

References

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Harada, K., Shimada, K., and Takahashi, Y., Microscopy 71 (2022). doi: 10.1093/jmicro/dfab054CrossRefGoogle ScholarPubMed
Authors are grateful to Dr. Y. A. Ono of RIKEN and Dr. H. Shinada, and Dr. T. Kohashi of Hitachi, Ltd. for valuable discussions, Mr. N. Moriya of Hitachi, Ltd. and Mr. Y. Ichinosawa of Optnics Precision Co., Ltd. for technical support on the grating experiments. Authors thank Prof. S. Mori, Prof. Y. Ishii, and Dr. H. Nakajima of Osaka Prefecture University for evaluation of the ferrite magnet.Google Scholar
The work was supported by KAKENHI, Grant-in-Aid for Scientific Research (20K20555).Google Scholar