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Development of Objective Aperture Holder for Mounting Compact Cs Corrector on Conventional SEM

Published online by Cambridge University Press:  01 August 2018

Tsunenori Nomaguchi ,
Shunichi Motomura ,
Kenichi Nishinaka ,
Toshihide Agemura ,
Tadahiro Kawasaki ,
Ryuji Yoshida  and
Takeharu Kato
Tsunenori Nomaguchi
Affiliation:
Electron Microscope System Design 1st Dept., Hitachi High-Technologies, Hitachinaka, Japan.
Shunichi Motomura
Affiliation:
Electron Microscope System Design 1st Dept., Hitachi High-Technologies, Hitachinaka, Japan.
Kenichi Nishinaka
Affiliation:
Electron Microscope System Design 1st Dept., Hitachi High-Technologies, Hitachinaka, Japan.
Toshihide Agemura
Affiliation:
Electron Microscope System Design 1st Dept., Hitachi High-Technologies, Hitachinaka, Japan.
Tadahiro Kawasaki
Affiliation:
Nanostrucutres Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan.
Ryuji Yoshida
Affiliation:
Nanostrucutres Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan.
Takeharu Kato
Affiliation:
Nanostrucutres Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 646 - 647
Copyright
© Microscopy Society of America 2018 

References

[1] Kawasaki, T., et al, Suf. Int. Anal 48 2016) p. 1160.Google Scholar
[2] This development was supported by SENTAN, JST.Google Scholar