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Development of Novel Thin Film Deposition Methods in a CrossBeam® FIB-SEM Platform Using an OmniGISTM

Published online by Cambridge University Press:  03 August 2008

EL Principe ,
C Hartfield ,
R Kruger  and
A Smith
EL Principe
Affiliation:
Carl Zeiss SMT Inc
C Hartfield
Affiliation:
OmniProbe
R Kruger
Affiliation:
Carl Zeiss SMT Inc
A Smith
Affiliation:
OmniProbe
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 990 - 991
Copyright
© 2008 Microscopy Society of America

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