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Development of in situ Imaging Capabilities in SEM and Their Applications

Published online by Cambridge University Press:  05 August 2019

Y Hashimoto ,
A Muto ,
K Shigeto ,
H Ito ,
H Itabashi ,
M Ohno ,
T Saito  and
S Tachibana
Y Hashimoto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan.
A Muto
Affiliation:
Nanotechnology System Division, Hitachi High Technologies America, Inc., MD, USA.
K Shigeto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan.
H Ito
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan.
H Itabashi
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan.
M Ohno
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan.
T Saito
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan.
S Tachibana
Affiliation:
Marketing Dept., Hitachi High-Technologies Corporation, Tokyo, Japan.

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 564 - 565
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Kubo, M et al. , ISIJ Int. 56 (4) (2016), p. 669.Google Scholar