Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-26T13:30:53.467Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of High Resolution FE-SEM (8"FE-SEM) For 8-Inches wafer inspection

Published online by Cambridge University Press:  02 July 2020

K. Ohara ,
C. Nielsen  and
M. Saito
K. Ohara
Affiliation:
JEOL. Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
C. Nielsen
Affiliation:
JEOL. USA, Inc., 11 Dearborn Road, Peabody, Mass, 01960, USA
M. Saito
Affiliation:
JEOL. Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Get access

Extract

Semiconductor production using 8-inches wafers seems to be widely carried out in semiconductor factories. Many FE-SEMs are coming to be used for their particle/defect inspection. As semiconductor processing turns precise, the need of a high resolution FE-SEM has been rising all the more.

Now, JEOL announces a high resolution FE-SEM (8"FE-SEM) for 8-inches wafer inspection, which takes over the strong point of the semi-in-lens field emission scanning electron microscope (FE-SEM) JSM-6340F which has been getting expensive evaluation with its high resolution performance. The 8"FE-SEM possesses a resolution of 3.0nm at lkV of its acceleration voltage and 1.2nm at 15kV, as its semi-in-lens type object lens makes it possible to minimize the aberration.

High resolution observation and inclined wafer observation can be selected properly by changing the wafer holder, as such a holder exchange system has been usually used for transmission electron microscopes.

Type
Advances in Instrumentation and Performance
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 406 - 407
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)