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Development of An 0.2eV Energy Resolution Analytical Electron Microscope

Published online by Cambridge University Press:  01 November 2002

M. Tanaka
Affiliation:
Institute of Multidisciplinary Research for Advanced materials, Tohoku University, Sendai, Japan
M. Terauchi
Affiliation:
Institute of Multidisciplinary Research for Advanced materials, Tohoku University, Sendai, Japan
K. Tsuda
Affiliation:
Institute of Multidisciplinary Research for Advanced materials, Tohoku University, Sendai, Japan
K. Saitoh
Affiliation:
Institute of Multidisciplinary Research for Advanced materials, Tohoku University, Sendai, Japan
M. Mukai
Affiliation:
JEOL LTD., 1-2 Musashino-3 Akishima, Tokyo, Japan
T. Kaneyama
Affiliation:
JEOL LTD., 1-2 Musashino-3 Akishima, Tokyo, Japan
T. Tomita
Affiliation:
JEOL LTD., 1-2 Musashino-3 Akishima, Tokyo, Japan
K. Tsuno
Affiliation:
JEOL LTD., 1-2 Musashino-3 Akishima, Tokyo, Japan
M. Kersker
Affiliation:
JEOL USA, INC., 11 Dearborn Road, Peabody, MA 01960
M. Naruse
Affiliation:
JEOL LTD., 1-2 Musashino-3 Akishima, Tokyo, Japan
T. Honda
Affiliation:
JEOL LTD., 1-2 Musashino-3 Akishima, Tokyo, Japan

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2002