Article contents
Development of a Reference Material for Image Sharpness Evaluation in Scanning Electron Microscopy
Published online by Cambridge University Press: 25 July 2016
Abstract
An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
- Type
- Abstract
- Information
- Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 448 - 449
- Copyright
- © Microscopy Society of America 2016
References
[1]
ISO/TS 24597 (2011). Microbeam analysis—Scanning electron microscopy — Methods of evaluating image sharpness (2011).Google Scholar
[3] A part of this study was conducted as one of the activities in Japan Industrial Technology Association supported by JKA Foundation (FY2015).Google Scholar