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Development of a Cryo-Air Protection Holder for FIB/(S)TEM

Published online by Cambridge University Press:  08 April 2017

Y Kuroda
Affiliation:
Hitachi High-Technologies, Japan
M Kudo
Affiliation:
Hitachi High-Technologies, Japan
A Morikawa
Affiliation:
Hitachi High-Technologies, Japan
T Sato
Affiliation:
Hitachi High-Technologies, Japan
T Iwahori
Affiliation:
Hitachi High-Technologies, Japan
T Agemura
Affiliation:
Hitachi High-Technologies, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011