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The Development and Application of the Tripod Polishing Technique

Published online by Cambridge University Press:  02 July 2020

J. Benedict
Affiliation:
IBM Corp, Mail Stop E-40, 1580 Route 52, Hopewell Junction, NY12533-6531
S.J. Klepeis
Affiliation:
IBM Corp, Mail Stop E-40, 1580 Route 52, Hopewell Junction, NY12533-6531
R. Anderson
Affiliation:
IBM Corp, Mail Stop E-40, 1580 Route 52, Hopewell Junction, NY12533-6531
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Extract

The Tripod polishing technique is used to mechanically polish materials for further analysis by optical, SEM or TEM. The mechanical polishing is done using the Tripod Polisher (FIG. 1), which consists of three Delrin capped micrometers and an L-bracket. The micrometers provide accurate side-to-side and front-to-back adjustments of the polishing plane. The L-bracket is where the sample is attached to the polisher and it comes in a number of configurations, depending on the type of analysis needed. by attaching the sample at different locations on the L-bracket, either planar sections or cross sections can be made using the Tripod Polisher.

A sample to be cross sectioned is attached to the front of the L-bracket with wax . The micrometers are then adjusted so the bottom of the Delrin feet are aligned with the area of interest. The polisher is held on a rotating diamond wheel, with the Delrin feet and the sample in contact with the wheel.

Type
Technologists’ Forum: Special Topics and Symposium
Copyright
Copyright © Microscopy Society of America 1997

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References

1. Benedict, J., et al., Mater. Res. Soc. Proc. 254(1992)121.CrossRefGoogle Scholar

2. Anderson, R.et al., Mater. Res. Soc, in press (1997).Google Scholar

3. Klepeis, S.J.et al., Mater. Res. Soc. Proc. 115(1987)179.CrossRefGoogle Scholar