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Determining the Polarization Fraction of Thin Film Ferroelectric HZO with STEM EBIC

Published online by Cambridge University Press:  22 July 2022

Ho Leung Chan ,
Shelby S. Fields ,
Tristan O'Neill ,
Yueyun Chen ,
William A. Hubbard ,
Jon F. Ihlefeld  and
B. C. Regan
Ho Leung Chan
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA
Shelby S. Fields
Affiliation:
Department of Materials Science and Engineering and Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
Tristan O'Neill
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA
Yueyun Chen
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA
William A. Hubbard
Affiliation:
NanoElectronic Imaging, Inc., Los Angeles, CA, USA
Jon F. Ihlefeld
Affiliation:
Department of Materials Science and Engineering and Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
B. C. Regan*
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA NanoElectronic Imaging, Inc., Los Angeles, CA, USA
*
*Corresponding author: [email protected]

Abstract

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Type
Insights into Phase Transitions in Functional Materials by In Situ/Operando TEM: Experiment Meets Theory
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2270 - 2271
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Copyright
Copyright © Microscopy Society of America 2022

References

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Batra, R et al. , The Journal of Physical Chemistry C 121 (2017), p. 4139.CrossRefGoogle Scholar
Fields, SS et al. , Applied Physics Letters 118 (2021), 102901.CrossRefGoogle Scholar
Hubbard, WA, Advanced Functional Materials 32 (2021), p. 2102313.Google Scholar
This work was supported by National Science Foundation (NSF) award DMR-2004897 and by NSF Science and Technology Center (STC) award DMR-1548924 (STROBE).Google Scholar