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Determining the Causes of Scanning Distortions in SEM and FIB

Published online by Cambridge University Press:  23 September 2015

Mariusz Pluska ,
Andrzej Czerwinski ,
Marek Wzorek ,
Marcin Juchniewicz  and
Jerzy Katcki
Mariusz Pluska
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Andrzej Czerwinski
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Marek Wzorek
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Marcin Juchniewicz
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Jerzy Katcki
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1703 - 1704
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Kim, D.H., Kim, S.J. & Oh, S.K., Nuclear Instruments and Methods in Physics Research A 620(2 (2010). p. 112.Google Scholar
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[3] Pluska, M., et at, Nuclear Instruments and Methods in Physics Research B (2014) doi:10.1016/j.nimb.2014.11.020.Google Scholar
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[6] Cheung, C.S. Shielding Effectiveness of Superalloy, Aluminum, and Mumetal Shielding Tapes 2009). Master's Theses and Project Reports, p. 126.Google Scholar
[7] The research was partially supported by the grant LIDER/26/169/L-3/11/NCBR/2012 of National Centre for Research and Development, Poland.Google Scholar