Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-27T02:42:28.188Z Has data issue: false hasContentIssue false
  • English
  • Français

Determination of Thin Film Thickness and Composition using Energy Dispersive EPMA

Published online by Cambridge University Press:  22 July 2022

Ralf Terborg ,
Kyung Joong Kim  and
Vasile-Dan Hodoroaba
Ralf Terborg*
Affiliation:
Bruker Nano GmbH, Am Studio 2D, 12489 Berlin, Germany
Kyung Joong Kim
Affiliation:
Korea Research Institute of Standards and Science (KRISS), Division of Industrial Metrology, Daejeon, Korea Federal Institute for Materials
Vasile-Dan Hodoroaba
Affiliation:
Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, Berlin, Germany
*
*[email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
On Demand - Quantitative And Qualitative Mapping Of Materials
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 672 - 673
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Stratagem Version 6.7, SAMx, www.samx.com, 1554 route de la Roquette, 06670 Levens, FranceGoogle Scholar
Hodoroaba, V-D, Kim, KJ and Unger, WES, Surf. Interface Anal. 44 (2012) 1459CrossRefGoogle Scholar
Hodoroaba, V-D et al. , Surf. Interface Anal. 52 (2020) 929CrossRefGoogle Scholar
Moy A, A and Fournelle, J, Microsc. Microanal. 27 (2021) 284CrossRefGoogle Scholar