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Determination of Thin Film Thickness and Composition using Energy Dispersive EPMA

Published online by Cambridge University Press:  22 July 2022

Ralf Terborg ,
Kyung Joong Kim  and
Vasile-Dan Hodoroaba
Ralf Terborg*
Affiliation:
Bruker Nano GmbH, Am Studio 2D, 12489 Berlin, Germany
Kyung Joong Kim
Affiliation:
Korea Research Institute of Standards and Science (KRISS), Division of Industrial Metrology, Daejeon, Korea Federal Institute for Materials
Vasile-Dan Hodoroaba
Affiliation:
Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, Berlin, Germany
*
*[email protected]

Abstract

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Type
On Demand - Quantitative And Qualitative Mapping Of Materials
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 672 - 673
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Copyright
Copyright © Microscopy Society of America 2022

References

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