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Determination of Corner Positions for Calculation of Step Height of Atomic Force Microscope Images Based on ISO 5436-1

Published online by Cambridge University Press:  27 March 2013

Adedayo S. Adebayo ,
Zhao Xuezeng  and
Wang Weijie
Adedayo S. Adebayo*
Affiliation:
Harbin Institute of Technology, Nano-measurement and Characterization Lab, School of Mechatronics, Harbin, 150001, Heilongjiang, China
Zhao Xuezeng
Affiliation:
Harbin Institute of Technology, Nano-measurement and Characterization Lab, School of Mechatronics, Harbin, 150001, Heilongjiang, China
Wang Weijie
Affiliation:
Harbin Institute of Technology, Nano-measurement and Characterization Lab, School of Mechatronics, Harbin, 150001, Heilongjiang, China
*
*Corresponding author. E-mail: [email protected]
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Abstract

Step height is defined as the vertical spacing between two plane-parallel planes comprising an elevation or an indentation and the substrate. In atomic force microscopy (AFM), there are many algorithms for determining feature dimensions such as step height and width. One common problem of many algorithms is the difficulty for users to accurately determine the corner positions needed to properly implement the said algorithms. A new algorithm based on ISO 5436-1 is proposed that determines the necessary corner positions along with two examples illustrating the implementation of this algorithm. We propose calling this new method the determinant method. Since the corner positions are automatically decided, feature dimensions such as step height of an AFM image are easily determined. Comparative experiments carried out to compare the step height measurement using this algorithm and the SPIP software from Image Metrology show encouraging results.

Keywords

atomic force microscopescanning probe microscopestep heighthistogram methoddeterminant methodnanometrologyimage processing
Type
Equipment and Techniques Development: Materials
Information
Microscopy and Microanalysis , Volume 19 , Issue 3 , June 2013 , pp. 769 - 774
Copyright
Copyright © Microscopy Society of America 2013 

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References

Bhushan, B. (Ed.) (2004). Handbook of Nanotechnology. Berlin: Springer.Google Scholar
Binnig, G., Quate, C.F. & Gerber, C. (1986). Atomic force microscope. Phys Rev Lett 56, 930–933.CrossRefGoogle ScholarPubMed
Capella, B. & Dietler, G. (1999). Force-distance curves by atomic force microscope. Surf Sci Rep 34, 1–104.CrossRefGoogle Scholar
Dziomba, T., Koenders, L., Danzebrink, H. & Wilkening, G. (2004). Lateral and vertical calibrations of scanning probe microscopes and their measurement uncertainty. In Dietzsch (Hrsg.): Proc. XIth Int. Colloq. on Surfaces, pp. 117–128. Aachen, Germany: Shaker Verlag.Google Scholar
Fu, J., Chu, W., Dixson, R. & Vorburger, T. (2008). Three-dimensional image correction of tilted samples through coordinate transformation. Scanning 30, 41–46.CrossRefGoogle ScholarPubMed
Fu, J., Tsai, V., Köning, R., Dixson, R. & Vorburger, T. (1999). Algorithms for calculating single-atom step heights. Nanotechnology 10, 428–433.CrossRefGoogle Scholar
ITRS (2012). International Technology Roadmap for Semiconductors, Metrology. The Semiconductor Industry Association. Available at http://public.itrs.net/.Google Scholar
Köning, R., Dixson, R.G, Fu, J., Renegar, B.T., Vorburger, T.V., Tsai, V.W. & Postek, M.T. (1999). Step height metrology for data storage applications. In Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, SPIE Confernece Proceedigns 3806, pp. 21–28, Denver, CO, USA.CrossRefGoogle Scholar
Meyer, E., Hug, H.H. & Bennewitz, R. (2004). Scanning Probe Microscopy. Heidelberg: Springer.CrossRefGoogle Scholar
Pandey, R. (2010). A Text Book of Engineering Mathematics, vol. 2. Lucknow, India: Word Press.Google Scholar
Teague, E.C. (1991). Nanometrology. In Scanned Probe Microscope, Wckramasinghe, H.K. (Ed.), vol. 241, pp. 317–407. Santa Barbara, CA: American Institute of Physics.Google Scholar
VDI/VDE 2656-1 (2008). Determination of geometrical quantities by using scanning probe microscopes. Berlin, Germany: Beuth Verlag GmbH. Google Scholar
Vezzetti, C.F., Varner, R.N. & Potzick, J.E. (1992). NIST Special Publication 260-117. Gaithersburg, MD: National Institute of Standards and Technology. Google Scholar
Zhao, X., Vorburger, T.V., Fu, J., Song, J. & Nguyen, C.V. (2003). A model for step height, edge slope and linewidth measurements using AFM. In Characterization and Metrology for ULSI Technology, Seiler, D.G., Diebold, A.C., Shaffer, T.J., McDonald, R., Zollner, S., Khosla, R.P. & Secula, E.M. (Eds.), vol. 683, pp. 400–408. New York: American Institute of Physics.Google Scholar