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Detailed Investigation of Silicon Nitride Phase Plates Prepared by Focused Ion Beam Milling

Published online by Cambridge University Press:  05 August 2019

Alexander Müller ,
Daniel B. Durham ,
Karen C. Bustillo ,
Frances I. Allen ,
Andrew M. Minor  and
Colin Ophus
Alexander Müller
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA. Department of Materials Science and Engineering, University of California, Berkeley, CA, USA.
Daniel B. Durham
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA. Department of Materials Science and Engineering, University of California, Berkeley, CA, USA.
Karen C. Bustillo
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
Frances I. Allen
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA. Department of Materials Science and Engineering, University of California, Berkeley, CA, USA.
Andrew M. Minor
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA. Department of Materials Science and Engineering, University of California, Berkeley, CA, USA.
Colin Ophus*
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 900 - 901
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Uchida, M and Tonomura, A., Nature 464 (2010), p. 737.Google Scholar
[2]Ophus, C et al. , Nature Communications 7 (2016), p. 10719.Google Scholar
[3]Shiloh, R et al. , Ultramicroscopy 189 (2018), p. 46.Google Scholar
[4]Harvey, TR et al. , New Journal of Physics 16 (2014), p. 09303.Google Scholar
[5]Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. Daniel B. Durham was supported by STROBE: A National Science Foundation Science & Technology Center under Grant No. DMR 1548924.Google Scholar