Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-27T11:44:00.937Z Has data issue: false hasContentIssue false

Demonstration of High Efficiency Diffractive Optics for Electrons Fabricated with Ion Beam Gas-Assisted Etching

Published online by Cambridge University Press:  05 August 2019

Cameron Johnson*
Affiliation:
Department of Physics, University of Oregon, Eugene, OR, USA.
Ben McMorran
Affiliation:
Department of Physics, University of Oregon, Eugene, OR, USA.
*
*Corresponding author: [email protected]

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Focused Ion Beam Instrumentation and Techniques
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Lloyd, SM, et al. , Reviews of Modern Physics 89 (2017), p. 035004.Google Scholar
[2]Harvey, TR, et al. , New Journal of Physics 16 (2014), p. 093039.Google Scholar
[3]Grillo, V, et al. , Applied Physics Letters 104 (2014), p. 043109.Google Scholar
[4]Grillo., V, et al. , Physical Review Letters 114 (2014), p. 034801.Google Scholar
[5]Utke, I, et al. , Journal of Vacuum Science & Technology B 26 (2008), p. 1197.Google Scholar
[6]Yasin, F, et al. , Journal of Physics 51 (2018), p. 205104.Google Scholar
[7]Ophus, C, et al. , Nature Communications 7 (2016), p. 10719.Google Scholar
[8]Nanofabrication and microscopy were performed at the Center for Advanced Materials Characterization in Oregon (CAMCOR); the authors would like to thank Robert Fischer and Joshua Razink for their help. This material is based upon work supported by the National Science Foundation under No. 1607733, as well as the National Science Foundation Graduate Research Fellowship Program under Grant No. 1309047. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.Google Scholar