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Defect Characterization using Transmission Scanning Electron Microscopy

Published online by Cambridge University Press:  01 August 2018

Patrick Callahan ,
Jean-Charles Stinville ,
Eric Yao ,
McLean P. Echlin ,
Jungho Shin ,
Fulin Wang ,
Marc De Graef ,
Tresa M. Pollock  and
Daniel S. Gianola
Patrick Callahan
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
Jean-Charles Stinville
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
Eric Yao
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
McLean P. Echlin
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
Jungho Shin
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
Fulin Wang
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
Marc De Graef
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, USA
Tresa M. Pollock
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA
Daniel S. Gianola
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1836 - 1837
Copyright
© Microscopy Society of America 2018 

References

[1] Phillips, P., Brandes, M., Mills, M. De Graef, M. Ultramicroscopy 111 2011) p. 1483.Google Scholar
[2] Holm, J. Keller, R. Microscopy Today 25 2017) p. 12.Google Scholar
[3] Callahan, P.G., Stinville, J.-C., Yao, E., Echlin, M.P., Titus, M.S., De Graef, M., Gianola, D.S. Pollock, T.M. Ultramicroscopy 186 2018) p. 49.Google Scholar
[4 ] The authors acknowledge funding from the NSF MRSEC Program through DMR 1720256 (IRG-1). The research reported here made use of shared facilities of the UCSB MRSEC (NSF DMR 1720256), a member of the Materials Research Facilities Network (www.mrfn.org).Google Scholar