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Dedicated FIB Preparation for TEM Cross-section Samples of Nanowires Grown Vertically on Silicon Substrates

Published online by Cambridge University Press:  31 July 2006

M Kaiser ,
MA Verheijen ,
AL Roest  and
EPAM Bakkers
M Kaiser
Affiliation:
Philips Research Laboratories, The Netherlands
MA Verheijen
Affiliation:
Philips Research Laboratories, The Netherlands
AL Roest
Affiliation:
Philips Research Laboratories, The Netherlands
EPAM Bakkers
Affiliation:
Philips Research Laboratories, The Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 504 - 505
Copyright
© 2006 Microscopy Society of America