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Decomposition behavior of III/V semiconductor precursor gases in a closed gas cell in-situ TEM holder observed by mass spectrometry

Published online by Cambridge University Press:  30 July 2021

Maximilian Widemann ,
David Krug ,
Felix Gruber ,
Andreas Beyer  and
Kerstin Volz
Maximilian Widemann
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Marburg, Hessen, United States
David Krug
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, United States
Felix Gruber
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, United States
Andreas Beyer
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Germany
Kerstin Volz
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Germany

Abstract

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Type
New Frontiers in In-Situ Electron Microscopy in Liquids and Gases (L&G EM FIG Sponsored)
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2220 - 2222
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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