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Custom Scan Control and Time Resolved Signal Acquisition for High Resolution SEM Imaging

Published online by Cambridge University Press:  01 August 2018

William C. Lenthe ,
Jean-Charles Stinville ,
McLean P. Echlin ,
Zhe Chen ,
Samantha Daly ,
Tresa M. Pollock  and
Marc De Graef
William C. Lenthe
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Jean-Charles Stinville
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
McLean P. Echlin
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
Zhe Chen
Affiliation:
Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Samantha Daly
Affiliation:
Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Tresa M. Pollock
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
Marc De Graef
Affiliation:
Dept. of Materials Science and Engineering, Carnegie Mellon Univ., Pittsburgh, PA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 536 - 537
Copyright
© Microscopy Society of America 2018 

References

[1] Nolze, G Ultramicroscopy 107 2007) p. 172–183.Google Scholar
[2] Sutton, MA, et al, Meas. Sci. Technol. 17 2006) p. 2613.Google Scholar
[3] Carter, JL, et al, Mater. Sci. Eng., A 605 2014) p. 127–136.Google Scholar
[4] Woehl, TJ, et al, Ultramicroscopy 127 2013) p. 53–63.Google Scholar
[5] Sutton, MA, et al, Exp. Mech. 47 2007) p. 775–787.Google Scholar
[6] Sutton, MA, et al, Exp. Mech. 47 2007) p. 789–804.Google Scholar
[7] Kammers, AD Daly, S Exp. Mech. 53 2013) p. 1333–1341.Google Scholar
[8] Guizar-Sicairos, M, Thurman, ST Fienup, JR Opt. Lett. 33(2 2008) pp. 156–158.Google Scholar
[9] The authors acknowledge ONR Vannevar Bush Faculty Fellowship support (N00014-16-1-2821) as well as ONR grant N00014-16-1-2982 and an AFRL/AFOSR Center of Excellence Grant (FA9550-12- 1-0445). This work was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Award #DESC0008637 as part of the Center for PRedictive Integrated Structural Materials Science (PRISMS) at the University of Michigan.Google Scholar