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Cryo-FIB Minimizes Ga+ Milling Artifacts in Sn

Published online by Cambridge University Press:  27 August 2014

Tsengming Chou
Affiliation:
Dept of Chemical Engr and Matls Science, Stevens Institute of Technology, Hoboken, NJ, U.S.A
Maureen E. Williams
Affiliation:
MSED, Thermodynamics and Kinetics Group, NIST, Gaithersburg, MD, U.S.A

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Giannuzzi, L, et al Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice, Springer (2005).Google Scholar
[2] Binary Alloy Phase Diagrams, 2nd ed., ed. TB Massalski et al, ASM International, vol. 2, p. 1858 (1990).Google Scholar
[3] Meents, A, et al Origin and temperature dependence of radiation damage in biological samples at cryogenic temperatures, PNAS Vol.107 No.3 (2010), p. 1094 - 1099.Google Scholar
[4] This research effort used microscope resources partially funded by the National Science Foundation through NSF Grant DMR-0922522.Google Scholar