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Correcting an Aberration with a Wire Corrector for SEM

Published online by Cambridge University Press:  05 August 2019

Tomonori Nakano  and
Yu Yamazawa
Tomonori Nakano
Affiliation:
Research & Development Group, Hitachi, Ltd., Kokubunji, Japan.
Yu Yamazawa
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan.

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 846 - 847
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Rose, H., Nuclear Instruments and Methods in Physics Research 187 (1981), p. 187.Google Scholar
[2]Ito, H. et al. , U.S. patent 7,872,240 (2011)Google Scholar
[3]Hoque, S. et al. , Ultramicroscopy 161 (2016), p. 74.Google Scholar
[4]Nakano, T. and Yamazawa, Y., Journal of Vacuum Science & Technology B 37 (2019), p. 012901.Google Scholar