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Concepts for an Annular Pole Piece Detector for the Simultaneous Measurement of X-Rays and Backscattered Electrons Inside a SEM

Published online by Cambridge University Press:  27 August 2014

A. Liebel ,
R. Eckhardt ,
M. Bornschlegl ,
A. Bechteler ,
A. Niculae  and
H. Soltau
A. Liebel
Affiliation:
PNDetector GmbH, Emil-Nolde-Str.10, D-81735 München, Germany
R. Eckhardt
Affiliation:
PNDetector GmbH, Emil-Nolde-Str.10, D-81735 München, Germany
M. Bornschlegl
Affiliation:
PNDetector GmbH, Emil-Nolde-Str.10, D-81735 München, Germany
A. Bechteler
Affiliation:
PNDetector GmbH, Emil-Nolde-Str.10, D-81735 München, Germany
A. Niculae
Affiliation:
PNDetector GmbH, Emil-Nolde-Str.10, D-81735 München, Germany
H. Soltau
Affiliation:
PNDetector GmbH, Emil-Nolde-Str.10, D-81735 München, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1118 - 1119
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Soltau, H., et al., Microscopy & Microanalysis, vol. 15, S2 (2009), pp. 204-205.Google Scholar
[2] Liebel, A., et al., Microscopy & Microanalysis, vol. 19, S2 (2013), pp. 1134-1135.Google Scholar
[3] Liebel, A., et al., Microscopy & Microanalysis, vol. 18, S2 (2012), pp. 1206-1207.Google Scholar