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Comprehensive Nanofabrication by Correlating Crossbeam and ORION Nanofab

Published online by Cambridge University Press:  27 August 2014

Ingo Schulmeyer
Ingo Schulmeyer*
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Straße 22, 73447 Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1002 - 1003
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Ward, B., Notte, J.A. & Economou, N.P. Helium Ion Microscopy, Photonics Spectra 41.8 (2007),p. 68-70.Google Scholar