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Compositional and Structural Analysis of Al-doped ZnO Multilayers by LEAP

Published online by Cambridge University Press:  27 August 2014

A. D. Giddings ,
Y. Wu ,
M. A. Verheijen ,
T. J. Prosa ,
F. Roozeboom ,
D. J. Larson  and
W. M. M. Kessels
A. D. Giddings
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
Y. Wu
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
M. A. Verheijen
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
T. J. Prosa
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
F. Roozeboom
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
D. J. Larson
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
W. M. M. Kessels
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 526 - 527
Copyright
Copyright © Microscopy Society of America 2014 

References

References:

[1] Wu, Y., et al., J. App. Phys. 114 (2013) p. 024308.Google Scholar
[2] Larson, D. J., et al., Ultramicroscopy 79 (1999) p. 287.Google Scholar
[3] Miller, M. K., et al., Microsc. Microanal. 13 (2007) p. 428.Google Scholar
[4] Kelly, T. F. & Larson, D. J. Annu. Rev. Mater. Res. 42 (2012) p. 1.Google Scholar