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Composition and Thickness Mapping Using STEM EDS

Published online by Cambridge University Press:  01 August 2018

Meiken Falke ,
Johanna Kraxner ,
Ralf Terborg ,
Gerald Kothleitner  and
Werner Grogger
Meiken Falke
Affiliation:
Bruker Nano GmbH, Berlin, Germany
Johanna Kraxner
Affiliation:
Institute for Electron Microscopy and Nanoanalysis (FELMI) & Graz Centre for Electron Microscopy (ZFE), Graz University of Technology, Graz, Austria
Ralf Terborg
Affiliation:
Bruker Nano GmbH, Berlin, Germany
Gerald Kothleitner
Affiliation:
Institute for Electron Microscopy and Nanoanalysis (FELMI) & Graz Centre for Electron Microscopy (ZFE), Graz University of Technology, Graz, Austria
Werner Grogger
Affiliation:
Institute for Electron Microscopy and Nanoanalysis (FELMI) & Graz Centre for Electron Microscopy (ZFE), Graz University of Technology, Graz, Austria

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 764 - 765
Copyright
© Microscopy Society of America 2018 

References

[1] Kothleitner, G., et al, Microsc. Microanal 20 2014) p. 678.Google Scholar
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[4] Gauvin, R. Microsc. Microanal. 18 2012) p. 915.Google Scholar