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Combining Atomic-Scale EDX with Inelastic Multislice Simulations for Quantitative Chemical Analysis of AlGaN/GaN 1 nm-thick Quantum Wells

Published online by Cambridge University Press:  22 July 2022

Florian Castioni ,
Sergi Cuesta ,
Nicolas Bernier ,
Patrick Quéméré ,
Eric Robin ,
Vincent Delaye ,
Eva Monroy  and
Pascale Bayle-Guillemaud
Florian Castioni*
Affiliation:
 Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Sergi Cuesta
Affiliation:
 Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France
Nicolas Bernier
Affiliation:
 Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Patrick Quéméré
Affiliation:
 Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Eric Robin
Affiliation:
 Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France
Vincent Delaye
Affiliation:
 Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Eva Monroy
Affiliation:
 Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France
Pascale Bayle-Guillemaud
Affiliation:
 Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France
*
*Corresponding author: [email protected]

Abstract

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Type
Advanced Imaging and Spectroscopy for Nanoscale Materials
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2564 - 2566
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Copyright
Copyright © Microscopy Society of America 2022

References

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This work, done on the NanoCharacterisation PlatForm (PFNC), was supported by the “Recherches Technologiques de Base” Program of the French Ministry of Research.Google Scholar