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Combined SEM-FIB-SPM-TOF-EDX-EBSD as a Multifunctional Tool

Published online by Cambridge University Press:  23 November 2012

J. Jiruse ,
L. Sedlacek ,
M. Rudolf ,
V. Friedli ,
F. Oestlund  and
J. Whitby
J. Jiruse
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
L. Sedlacek
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
M. Rudolf
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
V. Friedli
Affiliation:
SPECS, Berlin, Germany
F. Oestlund
Affiliation:
TOFWERK, Thun, Switzerland
J. Whitby
Affiliation:
EMPA, Thun, Switzerland
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 638 - 639
Copyright
Copyright © Microscopy Society of America 2012

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