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Combined plasma FIB-SEM

Published online by Cambridge University Press:  23 November 2012

J. Jiruse
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
T. Hrncir
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
F. Lopour
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
M. Zadrazil
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
A. Delobe
Affiliation:
Orsay Physics, Fuveau, France
O. Salord
Affiliation:
Orsay Physics, Fuveau, France
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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