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Chemical State Mapping of Amorphous Carbon Films by Soft X-ray Emission Spectroscopy

Published online by Cambridge University Press:  05 August 2019

Masami Terauchi  and
Yohei Sato
Masami Terauchi*
Affiliation:
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai, Japan.
Yohei Sato
Affiliation:
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai, Japan.
*
*Corresponding author: [email protected]

Abstract

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Type
Spectroscopy and Imaging of Nanostructured Low-Z Materials in the Electron Microscope
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1754 - 1755
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Takahashi, H et al. , Microscopy and Microanalysis 19 (S2) (2013), p. 1258.Google Scholar
[2]Ishii, S et al. , Microscopy 67 (2018), p. 244.Google Scholar
[3]Nitta, S et al. , Journal of Non-Crystalline Solids 227-230 (1998), p. 655.Google Scholar
[4]Iwano, Y et al. , Japanese Journal of Applied Physics 47 (2008), p. 7842.Google Scholar
[5]Results of a-CNx and DLC are collaborated ones with Prof. Aono of Kagoshima Univ. and Prof. Takakuwa of Tohoku Univ., respectively. Those works were partly supported by the Research Program of “Dynamic Alliance for Open Innovation Bridging Human, Environment and Materials” in “Network Joint Research Centre for Materials and Devices”.Google Scholar