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Chemical State Information of Bulk Specimens Obtained by SEM-Based Soft-X-Ray Emission Spectrometry

Published online by Cambridge University Press:  14 March 2014

Masami Terauchi ,
Shogo Koshiya ,
Futami Satoh ,
Hideyuki Takahashi ,
Nobuo Handa ,
Takanori Murano ,
Masato Koike ,
Takashi Imazono ,
Masaru Koeda  and
Tetsuya Nagano
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Masami Terauchi*
Affiliation:
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
Shogo Koshiya
Affiliation:
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
Futami Satoh
Affiliation:
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
Hideyuki Takahashi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Nobuo Handa
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Takanori Murano
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Masato Koike
Affiliation:
Quantum Beam Science Directorate, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan
Takashi Imazono
Affiliation:
Quantum Beam Science Directorate, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan
Masaru Koeda
Affiliation:
Device Department, SHIMADZU Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
Tetsuya Nagano
Affiliation:
Device Department, SHIMADZU Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
Hiroyuki Sasai
Affiliation:
Device Department, SHIMADZU Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
Yuki Oue
Affiliation:
Device Department, SHIMADZU Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
Zeno Yonezawa
Affiliation:
Device Department, SHIMADZU Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
Satoshi Kuramoto
Affiliation:
Device Department, SHIMADZU Corp., 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
*
*Corresponding author. [email protected]
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Abstract

Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.

Keywords

soft-X-ray emission spectroscopygrating spectrometerchemical analysisscanning electron microscopebulk specimen
Type
EDGE Special Issue
Information
Microscopy and Microanalysis , Volume 20 , Issue 3 , June 2014 , pp. 692 - 697
Copyright
© Microscopy Society of America 2014 

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