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Charging of a Structured Material during Electron Beam Exposure

Published online by Cambridge University Press:  01 August 2002

M. Kotera  and
Y. Ishida
M. Kotera
Affiliation:
Osaka Institute of Technology, EICE Dept. Omiya, Asahi-ku, Osaka, 535-8585, Japan
Y. Ishida
Affiliation:
Osaka Institute of Technology, EICE Dept. Omiya, Asahi-ku, Osaka, 535-8585, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1172 - 1173
Copyright
Copyright © Microscopy Society of America 2002